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Proceedings Paper

Development and testing of a MEMS piezoelectric energy harvester
Author(s): Ryan R. Knight; Changki Mo; William W. Clark
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Paper Abstract

This paper presents a finite element analysis of an interdigitated ( d33 ) piezoelectric unimorph cantilever beam for harvesting vibration energy. The key feature that is analyzed is the poling behavior of the piezoelectric material. While simplified models of interdigitated piezoelectric devices assume some uniform and well-defined poling pattern, the finite element modeling shows that not to be the case. In this paper, a "percent poling factor" is developed with which to capture the real losses associated with non-uniform poling. A parametric study is carried out in which electrode patterns, piezoelectric layer dimensions and electrode dimensions are varied to see their effect on this percent poling factor. Optimal parameters are pointed out. Finally, experimental energy harvesting results for a micro-scale interdigitated beam are presented.

Paper Details

Date Published: 6 April 2009
PDF: 9 pages
Proc. SPIE 7288, Active and Passive Smart Structures and Integrated Systems 2009, 72880A (6 April 2009); doi: 10.1117/12.815533
Show Author Affiliations
Ryan R. Knight, Univ. of Pittsburgh (United States)
Changki Mo, Univ. of Pittsburgh (United States)
William W. Clark, Univ. of Pittsburgh (United States)

Published in SPIE Proceedings Vol. 7288:
Active and Passive Smart Structures and Integrated Systems 2009
Mehdi Ahmadian; Mehrdad N. Ghasemi-Nejhad, Editor(s)

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