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Proceedings Paper

Vibration analysis of the zigzag micro-structure for energy harvesting
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Paper Abstract

An analytical method is developed to calculate the natural frequencies and the corresponding mode shapes of a zigzag structure proposed for MEMS energy harvesting from ambient vibrations. The high natural frequencies of the existing designs of MEMS vibrational energy harvesters are serious drawbacks. A zigzag design is proposed to overcome this deficit. The governing partial differential equations are solved using separation of variables for each of the lateral beams in the structure. The vibration of each beam is related to the vibration of its neighbor beams by continuity and equilibrium conditions. Finally enforcing the boundary conditions results the corresponding eigenvalue problem revealing the natural frequencies and mode shapes. The usefulness of the design is proved by the relation between the natural frequencies and number of elements, providing a method of designing a MEMS harvester with low natural frequency.

Paper Details

Date Published: 6 April 2009
PDF: 11 pages
Proc. SPIE 7288, Active and Passive Smart Structures and Integrated Systems 2009, 728809 (6 April 2009); doi: 10.1117/12.815476
Show Author Affiliations
Mohammad Amin Karami, Virginia Polytechnic Institute and State Univ. (United States)
Daniel J. Inman, Virginia Polytechnic Institute and State Univ. (United States)


Published in SPIE Proceedings Vol. 7288:
Active and Passive Smart Structures and Integrated Systems 2009
Mehdi Ahmadian; Mehrdad N. Ghasemi-Nejhad, Editor(s)

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