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Proceedings Paper

Statistical approach to design DRAM bitcell considering overlay errors
Author(s): Yu-Jin Pyo; Dae-Wook Kim; Jai-Kyun Park; Ji-Seong Doh; Hyun-Jae Kang; Ji-Suk Hong; Chul-Hong Park; Sang-Hoon Lee; Moon-Hyun Yoo
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Paper Abstract

Overlay performance and control requirements have become crucial for achieving high yield and reducing rework process. Increasing discrepancy between hardware solutions and overlay requirements, especially in sub-40nm dynamic random access memory (DRAM) devices, motivates us to study process budgeting techniques and reasonable validation methods. In this paper, we introduce a SMEM (Statistical process Margin Estimation Method) to design the DRAM cell architecture which considers critical dimension (CD) and overlay variations in the perspectives of both cell architecture and manufacturability. We also proposed the method to determine overlay specifications. Using the methodologies, we obtained successfully optimized sub-40 DRAM cells which accurately estimated process tolerances and determined overlay specifications for all layers.

Paper Details

Date Published: 12 March 2009
PDF: 7 pages
Proc. SPIE 7275, Design for Manufacturability through Design-Process Integration III, 72751L (12 March 2009); doi: 10.1117/12.815341
Show Author Affiliations
Yu-Jin Pyo, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Dae-Wook Kim, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Jai-Kyun Park, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Ji-Seong Doh, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Hyun-Jae Kang, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Ji-Suk Hong, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Chul-Hong Park, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Sang-Hoon Lee, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Moon-Hyun Yoo, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7275:
Design for Manufacturability through Design-Process Integration III
Vivek K. Singh; Michael L. Rieger, Editor(s)

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