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Proceedings Paper

High quality factor integrated passive devices for microwave and millimeter wave applications
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Paper Abstract

A fabrication process and multi project wafer run (MPW) service has been developed for realizing integrated passive devices. The fabrication process is simple and low cost ranging applications from consumer electronics to instrumentation and measurement as well as defense and scientific applications. The fabrication process is offered as an MPW service for all types of organizations being suitable for scientific experiments, product prototyping or optimization. The technology has used for realizing microwave and millimeter wave components. Measured result show that the technology as well as accurate design result in loss less than 1.1 dB at 60 GHz for an integrated band-pass filter.

Paper Details

Date Published: 31 March 2009
PDF: 6 pages
Proc. SPIE 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, 72910E (31 March 2009); doi: 10.1117/12.815263
Show Author Affiliations
Tauno Vähä-Heikkilä, VTT Technical Research Ctr. of Finland (Finland)

Published in SPIE Proceedings Vol. 7291:
Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009
Vijay K. Varadan, Editor(s)

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