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Proceedings Paper

Electron beam projection nanopatterning using crystal lattice images obtained from high resolution transmission electron microscopy
Author(s): Hyo-Sung Lee; Byung-Sung Kim; Hyun-Mi Kim; Jung-Sub Wi; Sung-Wook Nam; Kyung-Bae Jin; Ki-Bum Kim; Yoshihiro Arai
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Paper Abstract

We propose a novel concept of projection-type electron beam lithography to pattern nanometer scale periodic features with better throughput than a conventional-type of electron beam lithography system. Here, the nanometer scale periodic patterns are obtained from the phase contrast high resolution transmission electron microscopy images of the crystalline samples which are tenth of nanometer scales. We, thus, named this method as atomic image projection electron beam lithography (AIPEL). To realize this novel concept, we have modified the objective lens of conventional 200kV field emission transmission electron microscopy and also inserted patterning lens between the objective lens and the lithographic stage to vary the patterning magnification continuously from 50 times to 300 times. By using this AIPEL system, we successfully demonstrate nanopatterns with various sizes and shapes using the various high resolution lattice images obtained from single crystalline Si and polycrystalline β-Si3N4. We can vary the shapes of nanometer scale patterns by changing mask materials itself or the zone axis of observation in one mask material, and can vary the size of patterns by changing the magnification of patterning. Finally, we will discuss how one can improve the quality of image obtained from mask material.

Paper Details

Date Published: 26 January 2009
PDF: 7 pages
Proc. SPIE 7222, Quantum Sensing and Nanophotonic Devices VI, 72221B (26 January 2009); doi: 10.1117/12.815252
Show Author Affiliations
Hyo-Sung Lee, Seoul National Univ. (Korea, Republic of)
Byung-Sung Kim, Seoul National Univ. (Korea, Republic of)
Hyun-Mi Kim, Seoul National Univ. (Korea, Republic of)
Jung-Sub Wi, Seoul National Univ. (Korea, Republic of)
Sung-Wook Nam, Seoul National Univ. (Korea, Republic of)
Kyung-Bae Jin, Seoul National Univ. (Korea, Republic of)
Ki-Bum Kim, Seoul National Univ. (Korea, Republic of)
Yoshihiro Arai, JEOL Ltd. (Japan)


Published in SPIE Proceedings Vol. 7222:
Quantum Sensing and Nanophotonic Devices VI
Manijeh Razeghi; Rengarajan Sudharsanan; Gail J. Brown, Editor(s)

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