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Proceedings Paper

A diffraction grating scale for long range and nanometer resolution
Author(s): Kuang-Chao Fan; Bai-Kun Li; Chi-Hui Liu
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Paper Abstract

This paper presents a novel design of a laser linear encoder based on the principle of diffractive interferometry. It adopts a special design in optical path that can increase the alignment tolerance between the optical head and the grating. Because of the simple optical configuration and the merit of compact size, it can effectively reduce the environmental disturbance and allow higher stability. In addition, the signal process circuit can effectively decrease three major errors: the DC shift difference, the electronic gain difference and the phase orthogonal error of two sinusoid al output signals. The resolution can reach to 1nm. Experiment results showed the standard deviation was below 17nm for 15mm travel in normal laboratory environment.

Paper Details

Date Published: 12 January 2009
PDF: 8 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71334J (12 January 2009); doi: 10.1117/12.815188
Show Author Affiliations
Kuang-Chao Fan, National Taiwan Univ. (Taiwan)
Bai-Kun Li, National Taiwan Univ. (Taiwan)
Chi-Hui Liu, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)

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