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Proceedings Paper

Phase measurement via in-line digital holographic microscopy
Author(s): Weijuan Qu; Yingjie Yu; Wenjing Zhou; Hao Yan; Anand Asundi
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Paper Abstract

In-line digital holographic microscopy as a phase measurement tool for the inspection of micro-components is presented. Light diffracted by the micro-components interferes with the directly propagating beams to give the in-line digital hologram recorded by the CCD camera. The convolution method is used to calculate the diffractive propagation of the light in order to reconstruct the wavefront of the test specimen. A reference hologram without the test specimen is recorded for the phase reconstruction. Finally, the method is applied on a phase grating to test its refractive index of the coating material.

Paper Details

Date Published: 3 October 2008
PDF: 8 pages
Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550R (3 October 2008); doi: 10.1117/12.814526
Show Author Affiliations
Weijuan Qu, Nanyang Technological Univ. (Singapore)
Yingjie Yu, Shanghai Univ. (China)
Wenjing Zhou, Shanghai Univ. (China)
Hao Yan, Nanyang Technological Univ. (Singapore)
Anand Asundi, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 7155:
Ninth International Symposium on Laser Metrology
Chenggen Quan; Anand Asundi, Editor(s)

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