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Proceedings Paper

High-resolution interferometry with Nd:YAG laser for local probe microscopy
Author(s): Josef Lazar; Ondřej Číp; Martin Čížek; Mojmír Šerý
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Paper Abstract

We present a system of positioning a sample for various types of local probe microscopes with interferometric measurement of displacement. The positioning extends significantly the field of view of the local probe microscopy where not only the probe can be displaced over a small range by piezoelectric transducers but the sample can be positioned over a larger scale. The stage allows positioning with nanometer resolution in all three axes under a closed loop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedom of the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improves resolution and overall precision of the displacement monitoring.

Paper Details

Date Published: 3 October 2008
PDF: 8 pages
Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550L (3 October 2008); doi: 10.1117/12.814520
Show Author Affiliations
Josef Lazar, Institute of Scientific Instruments (Czech Republic)
Ondřej Číp, Institute of Scientific Instruments (Czech Republic)
Martin Čížek, Institute of Scientific Instruments (Czech Republic)
Mojmír Šerý, Institute of Scientific Instruments (Czech Republic)


Published in SPIE Proceedings Vol. 7155:
Ninth International Symposium on Laser Metrology

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