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Proceedings Paper

Advanced optical coatings of a segmented MEMS DM
Author(s): Michael A. Helmbrecht; Min He
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Paper Abstract

The performance of microelectromechanical systems deformable mirrors (MEMS DMs) continues to improve in areas of stroke, open-loop positioning, actuator count, and drive electronics. However, a key area lacking in the development of these devices is good optical coatings suitable for a broad spectrum of applications and wavelengths. This paper discusses the progress Iris AO has made towards coating its MEMS DMs with gold, protected aluminum, protected silver, and dielectric coatings.

Paper Details

Date Published: 24 February 2009
PDF: 4 pages
Proc. SPIE 7209, MEMS Adaptive Optics III, 72090M (24 February 2009); doi: 10.1117/12.813821
Show Author Affiliations
Michael A. Helmbrecht, Iris AO, Inc. (United States)
Min He, Iris AO, Inc. (United States)


Published in SPIE Proceedings Vol. 7209:
MEMS Adaptive Optics III
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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