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Proceedings Paper

Quantitative measurement of the molecular-mass distribution in calix[4]resorcinarene molecular glass resists by mass spectrometry
Author(s): W. E. Wallace; K. M. Flynn; C. M. Guttman; D. L. VanderHart; V. M. Prabhu; A. De Silva; N. M. Felix; C. K. Ober
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Paper Abstract

The polydispersity in the degree of functionalization for two calix[4]resorcinarenes was determined by measuring, quantitatively, their molecular mass distribution with matrix-assisted laser desorption/ionization time of flight mass spectrometry. A mathematical method for polydisperse materials is described that creates a calibration curve to correct the ion intensities in the mass spectrum to give a more reliable molecular mass distribution. One calix[4]resorcinarene was found to give accurate molecular mass distributions with little correction, while another having a very similar molecular structure was found to exhibit strong over counting of the oligomers having a high degree of functionalization.

Paper Details

Date Published: 1 April 2009
PDF: 9 pages
Proc. SPIE 7273, Advances in Resist Materials and Processing Technology XXVI, 72732L (1 April 2009); doi: 10.1117/12.813680
Show Author Affiliations
W. E. Wallace, National Institute of Standards and Technology (United States)
K. M. Flynn, National Institute of Standards and Technology (United States)
C. M. Guttman, National Institute of Standards and Technology (United States)
D. L. VanderHart, National Institute of Standards and Technology (United States)
V. M. Prabhu, National Institute of Standards and Technology (United States)
A. De Silva, Cornell Univ. (United States)
N. M. Felix, Cornell Univ. (United States)
C. K. Ober, Cornell Univ. (United States)


Published in SPIE Proceedings Vol. 7273:
Advances in Resist Materials and Processing Technology XXVI
Clifford L. Henderson, Editor(s)

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