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Proceedings Paper

Generation of nanostructured surfaces by interfering and no-interfering ultra-short pulse laser processing
Author(s): Y. Nakata; K. Tsuchida; N. Miyanaga
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Paper Abstract

Top down technology of ultra-short pulse laser processing was applied to induce liquidly process and generate new nanostructures such as nano-waterdrop, nanocrown, and fine web structure. For example, a nano-waterdrop was generated by a single shot ps laser irradiation and had the narrow dieter of about 50 nm. In the case of nanocrown, whiskers were standing at the edge of a nanohole, and the diameter of the whiskers was around 100 nm. In addition, wavelength-sized web structure was generated in a single shot of femtosecond laser irradiation.

Paper Details

Date Published: 24 February 2009
PDF: 8 pages
Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72011F (24 February 2009); doi: 10.1117/12.813673
Show Author Affiliations
Y. Nakata, Osaka Univ. (Japan)
K. Tsuchida, Fanuc Ltd. (Japan)
N. Miyanaga, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 7201:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
Michel Meunier; Andrew S. Holmes; Hiroyuki Niino; Bo Gu, Editor(s)

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