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Proceedings Paper

Defect reduction by using point-of-use filtration in a new coater/developer
Author(s): Toru Umeda; Shuichi Tsuzuki; Toru Numaguchi
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Paper Abstract

The impact of pore size and membrane material polarity on the effectiveness of point-of-use filtration is evaluated here. Decreased pore size and increased polarity in membrane materials were confirmed to positively influence the effectiveness of microbridge defect removal by a point-of-use filter in the LITHIUS ProTM coater/developer system. Comparative analysis of different solvent systems validates a model of competitive adsorption whereby morehydrophilic solvents and gel-like agglomerates preferentially interact with the Nylon 6,6 membrane surface. This suggests that adsorption is the dominant mechanism for microbridge defect removal via filtration. Therefore, utilizing filtration products built around polar membrane materials (like hydrophilic Nylon 6,6) will result in greater microbridge defect reduction than solely reducing filter pore size.

Paper Details

Date Published: 1 April 2009
PDF: 8 pages
Proc. SPIE 7273, Advances in Resist Materials and Processing Technology XXVI, 72734B (1 April 2009); doi: 10.1117/12.813662
Show Author Affiliations
Toru Umeda, Nihon Pall Ltd. (Japan)
Shuichi Tsuzuki, Nihon Pall Ltd. (Japan)
Toru Numaguchi, Nihon Pall Ltd. (Japan)

Published in SPIE Proceedings Vol. 7273:
Advances in Resist Materials and Processing Technology XXVI
Clifford L. Henderson, Editor(s)

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