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Proceedings Paper

Silicon slot waveguides for nonlinear optics
Author(s): A. Säynätjoki; L. Karvonen; A. Khanna; T. Alasaarela; A. Tervonen; S. Honkanen
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Paper Abstract

Slot waveguides are designed for silicon-based nonlinear optics. The critical processes in manufacturing such waveguides are lithography, etching and slot filling. Their effects on the properties of the waveguides are studied.

Paper Details

Date Published: 6 February 2009
PDF: 9 pages
Proc. SPIE 7212, Optical Components and Materials VI, 72120T (6 February 2009); doi: 10.1117/12.812974
Show Author Affiliations
A. Säynätjoki, Helsinki Univ. of Technology (Finland)
L. Karvonen, Helsinki Univ. of Technology (Finland)
A. Khanna, Helsinki Univ. of Technology (Finland)
T. Alasaarela, Helsinki Univ. of Technology (Finland)
A. Tervonen, Helsinki Univ. of Technology (Finland)
Luxdyne Ltd. (Finland)
S. Honkanen, Helsinki Univ. of Technology (Finland)


Published in SPIE Proceedings Vol. 7212:
Optical Components and Materials VI
Shibin Jiang; Michel J. F. Digonnet; John W. Glesener; J. Christopher Dries, Editor(s)

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