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Proceedings Paper

Uncooled infrared and terahertz detectors based on micromechanical mirror as a radiation pressure sensor
Author(s): Gennady P. Berman; Boris M. Chernobrod; Alan R. Bishop; Vyacheslav N. Gorshkov
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Paper Abstract

We consider midinfrared (5 - 25 μm) and terahertz (100 - 1000 μm), room-temperature detectors based on a microcantilever/micromirror sensor of the radiation pressure. The significant enhancement of sensitivity is due the combination of non-absorption detection and a high quality optical microcavity. Applications for spectrometry and imaging are analyzed. It is shown that the radiation pressure sensor potentially has sensitivity at the level of or better than the best conventional uncooled detectors.

Paper Details

Date Published: 18 February 2009
PDF: 12 pages
Proc. SPIE 7204, Micromachining and Microfabrication Process Technology XIV, 720403 (18 February 2009); doi: 10.1117/12.812541
Show Author Affiliations
Gennady P. Berman, Los Alamos National Lab. (United States)
Boris M. Chernobrod, Los Alamos National Lab. (United States)
Alan R. Bishop, Los Alamos National Lab. (United States)
Vyacheslav N. Gorshkov, Los Alamos National Lab. (United States)
Institute of Physics (Ukraine)


Published in SPIE Proceedings Vol. 7204:
Micromachining and Microfabrication Process Technology XIV
Mary-Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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