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Proceedings Paper

Fabrication of 1-dimension nano-material-based device and its electrical characteristics
Author(s): Xing Yang; Zhaoying Zhou; Fuzhong Zheng; Min Zhang
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Paper Abstract

In recent years, many kinds of 1-dimension nano-materials (Carbon nanotube, ZnO nanobelt and nanowire etc.) continue to emerge which exhibit distinct and unique electromechanical, piezoelectric, photoelectrical properties. In this paper, a 1-dimension nano-materials-based device was proposed. The bottom-up and top-down combined process were used for constructing CNT-array-based device and ZnO nanowire device. The electrical characteristics of the 1D nano-materials-based devices were also investigated. The measurement results of electrical characteristics demonstrate that it is ohm electrical contact behavior between the nano-material and micro-electrodes in the proposed device which also have the field effect. The proposed 1D nano-material-based device shows the application potential in the sensing fields.

Paper Details

Date Published: 2 February 2009
PDF: 7 pages
Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590Q (2 February 2009); doi: 10.1117/12.812006
Show Author Affiliations
Xing Yang, Tsinghua Univ. (China)
State Key Lab. of Transducer Technology (China)
Zhaoying Zhou, Tsinghua Univ. (China)
Fuzhong Zheng, Tsinghua Univ. (China)
Min Zhang, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 7159:
2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
Zhaoying Zhou; Shanhong Xia; Chih-Ming Ho; Helmut Seidel, Editor(s)

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