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Proceedings Paper

Study on clamped-clamped beam in-plane capacitive resonators
Author(s): Yingxia Jin; Yaquan Tang; Xiaomei Yu
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Paper Abstract

A clamped-clamped beam (CC beam) in-plane capacitive resonator with 100nm gap has been analyzed and fabricated by silicon micromachining technique in this paper. The nonlinearity effects in this device and the resonant mode of the main structure are analyzed and the overall system dynamics of motion equation and general solution are given firstly. The simulation results of resonant mode indicate that the structure size of the beam has great influence on the resonant frequency of beam. Moreover, with the high aspect-ratio combined poly- and single-crystal silicon micromachining technology (HARPSS), 100nm gap in-plane capacitive resonator has been fabricated.

Paper Details

Date Published: 2 February 2009
PDF: 8 pages
Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590P (2 February 2009); doi: 10.1117/12.811950
Show Author Affiliations
Yingxia Jin, Peking Univ. (China)
Beijing Institute of Technology (China)
Yaquan Tang, Peking Univ. (China)
Xiaomei Yu, Peking Univ. (China)


Published in SPIE Proceedings Vol. 7159:
2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
Zhaoying Zhou; Shanhong Xia; Chih-Ming Ho; Helmut Seidel, Editor(s)

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