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Proceedings Paper

Functions and three dimensional parameters of surface texture
Author(s): Qunfen Qi; Xiaojun Liu; Xiangqian Jiang
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Paper Abstract

This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of 'zero wear' volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

Paper Details

Date Published: 12 January 2009
PDF: 7 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713303 (12 January 2009); doi: 10.1117/12.811358
Show Author Affiliations
Qunfen Qi, Huazhong Univ. of Science and Technology (China)
Xiaojun Liu, Huazhong Univ. of Science and Technology (China)
Xiangqian Jiang, Huazhong Univ. of Science and Technology (China)
Univ. of Huddersfield (United Kingdom)


Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)

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