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Proceedings Paper

Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-light-emitting diode on SiC substrate
Author(s): T. Seko; S. Mabuchi; F. Teramae; A. Suzuki; Y. Kaneko; R. Kawai; S. Kamiyama; M. Iwaya; H. Amano; I. Akasaki
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Paper Abstract

To realize high-efficiency light-emitting diodes (LEDs), it is indispensable to increase light extraction efficiency. We propose the moth-eye structure on the surface of an LED chip, which consists of periodic cones with a pitch of optical wavelength scale, and enables the significantly enhancement of light extraction efficiency. We have developed a new technique for moth-eye structure fabrication, on the basis of low-energy electron-beam projection lithography (LEEPL), which can be applied to the mass production of LEDs. The moth-eye structure formed at the bottom of a SiC wafer has periodically arranged cones with a 300 nm pitch and a 750 nm height. We also present blue LEDs fabricated on SiC substrates with and without the moth-eye structure, and discuss the effect of the moth-eye structure on the performance of LEDs.

Paper Details

Date Published: 16 February 2009
PDF: 9 pages
Proc. SPIE 7216, Gallium Nitride Materials and Devices IV, 721628 (16 February 2009); doi: 10.1117/12.811348
Show Author Affiliations
T. Seko, Meijo Univ. (Japan)
S. Mabuchi, Meijo Univ. (Japan)
F. Teramae, EL-SEED Corp. (Japan)
A. Suzuki, EL-SEED Corp. (Japan)
Y. Kaneko, EL-SEED Corp. (Japan)
R. Kawai, Meijo Univ. (Japan)
S. Kamiyama, Meijo Univ. (Japan)
EL-SEED Corp. (Japan)
M. Iwaya, Meijo Univ. (Japan)
H. Amano, Meijo Univ. (Japan)
I. Akasaki, Meijo Univ. (Japan)


Published in SPIE Proceedings Vol. 7216:
Gallium Nitride Materials and Devices IV
Hadis Morkoç; Cole W. Litton; Jen-Inn Chyi; Yasushi Nanishi; Joachim Piprek; Euijoon Yoon, Editor(s)

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