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Proceedings Paper

Annealing effect on optical barrier in ion-implanted tellurite glass waveguides
Author(s): S. Berneschi; I. Cacciari; G. Nunzi Conti; S. Pelli; G. C. Righini; I. Bányász; N. Q. Khanh; T. Lohner; P. Petrik; Z. Zolnai; M. Bettinelli; A. Speghini; L. Mescia; F. Prudenzano
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Paper Abstract

Slab waveguides were fabricated in tellurite glasses by means of nitrogen ion implantation, using a wide range of ion doses (from 5x1012 to 8x1016 ions/cm2), in order to investigate their effects on the induced refractive index change. The results of the characterization, carried out by means of dark-line spectroscopy, show the presence of an optical barrier with a decrease of the refractive index at the end of range. Annealing post-implantation process was performed at different temperatures on higher doses (≥1016 ions/cm2) ion implanted slab waveguides and the characterization showed a decrease of the barrier effect probably due to a corresponding reduction of the defects inside the glass matrix.

Paper Details

Date Published: 9 February 2009
PDF: 8 pages
Proc. SPIE 7218, Integrated Optics: Devices, Materials, and Technologies XIII, 721807 (9 February 2009); doi: 10.1117/12.811153
Show Author Affiliations
S. Berneschi, Nello Carrara Institute of Applied Physics (Italy)
I. Cacciari, Nello Carrara Institute of Applied Physics (Italy)
G. Nunzi Conti, Nello Carrara Institute of Applied Physics (Italy)
Ctr. Studi e Ricerche Enrico Fermi (Italy)
S. Pelli, Nello Carrara Institute of Applied Physics (Italy)
G. C. Righini, Nello Carrara Institute of Applied Physics (Italy)
I. Bányász, Research Institute for Solid State Physics and Optics (Hungary)
N. Q. Khanh, Research Institute for Technical Physics and Materials Science (Hungary)
T. Lohner, Research Institute for Technical Physics and Materials Science (Hungary)
P. Petrik, Research Institute for Technical Physics and Materials Science (Hungary)
Z. Zolnai, Research Institute for Technical Physics and Materials Science (Hungary)
M. Bettinelli, Univ. degli Studi di Verona (Italy)
A. Speghini, Univ. degli Studi di Verona (Italy)
L. Mescia, Politecnico di Bari (Italy)
F. Prudenzano, Politecnico di Bari (Italy)


Published in SPIE Proceedings Vol. 7218:
Integrated Optics: Devices, Materials, and Technologies XIII
Jean-Emmanuel Broquin; Christoph M. Greiner, Editor(s)

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