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Proceedings Paper

Micro-fabricated electrostatic voltage sensor made of a thin bulk-silicon device layer
Author(s): Jan Dittmer; Rolf Judaschke; Stephanus Büttgenbach
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Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, ; doi: 10.1117/12.810731
Show Author Affiliations
Jan Dittmer, Technische Univ. Braunschweig (Germany)
Rolf Judaschke, Physikalisch-Technische Bundesanstalt (Germany)
Stephanus Büttgenbach, Technische Univ. Braunschweig (Germany)


Published in SPIE Proceedings Vol. 7269:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
Jung-Chih Chiao; Alex J. Hariz; David V. Thiel; Changyi Yang, Editor(s)

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