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Proceedings Paper

Exact locating of sub-surface microelectronic structures using scanning thermal-wave microscopy
Author(s): Jaehun Chung; Kyeongtae Kim; Gwangseok Hwang; Ohmyoung Kwon; Joon Sik Lee; Seungho Park; Young Ki Choi
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Paper Abstract

With the fast advance of ultra large scale integrated (ULSI) circuit technology, the need for sub-surface imaging technique to locate and characterize sub-surface defects in ULSI circuits has been growing. In this study we advance scanning thermal wave microscopy further so that the absolute phase lag of the thermal waves generated by an electrically heated sub-surface microelectronic structure buried in an ULSI circuit can be measured. The measurement of the absolute phase lag allowed exact locating of the vertical and horizontal position of buried microelectronic structures and evaluation of their soundness nondestructively.

Paper Details

Date Published: 30 December 2008
PDF: 8 pages
Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72681V (30 December 2008); doi: 10.1117/12.810688
Show Author Affiliations
Jaehun Chung, Koria Univ. (Korea, Republic of)
Kyeongtae Kim, Korea Univ. (Korea, Republic of)
Gwangseok Hwang, Korea Univ. (Korea, Republic of)
Ohmyoung Kwon, Korea Univ. (Korea, Republic of)
Joon Sik Lee, Seoul National Univ. (Korea, Republic of)
Seungho Park, Hongik Univ. (Korea, Republic of)
Young Ki Choi, Chung-Ang Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7268:
Smart Structures, Devices, and Systems IV
Said Fares Al-Sarawi; Vijay K. Varadan; Neil Weste; Kourosh Kalantar-Zadeh, Editor(s)

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