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Proceedings Paper

Investigation of repeatability of sol-gel iridium oxide pH sensor on flexible substrate
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Paper Abstract

In this paper, we presented the fabrication process of miniature pH sensor arrays on flexible polymer substrates. The repeatability of the sensors based on sol-gel fabrication processes was investigated. The sensor repeatability was characterized with linearity, decay time, environmental parameter control and potential stability. Similar linear responses were found in different batches of sensor arrays. Near super- Nernstian responses were measured on each sensor with slope ranges from -71.6 to -110 mV/pH within a pH range between 2 and 12. The response times were compared in different batches. Six to twenty five seconds of average decay time were shown in each sample repeatedly. Three sensors showed the close potential response in different volumes of pH buffer solution. The sensor showed good stability in each step of the titration process between pH values of 1.8 and 11.9. The peak and saturated potential values presented high correlation with pH values with minor noises. The results showed good sensitivity, stability and repeatability using the sol-gel processes for iridium-oxide pH sensors on flexible substrates.

Paper Details

Date Published: 30 December 2008
PDF: 9 pages
Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 726916 (30 December 2008); doi: 10.1117/12.810675
Show Author Affiliations
Wen-Ding Huang, The Univ. of Texas at Arlington (United States)
Lun-Chen Hsu, The Univ. of Texas at Arlington (United States)
Jianqun Wang, The Univ. of Texas at Arlington (United States)
Thermpon Ativanichayaphong, The Univ. of Texas at Arlington (United States)
Sanchali Deb, The Univ. of Texas at Arlington (United States)
Mu Chiao, The Univ. of British Columbia (Canada)
J. C. Chiao, The Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 7269:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
Jung-Chih Chiao; Alex J. Hariz; David V. Thiel; Changyi Yang, Editor(s)

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