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Proceedings Paper

Ni-PTFE electroformed micro parts by SU8-based UV-LIGA
Author(s): Yuhua Guo; Yingnan Wang; Tom C. Kong; R. Du
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Paper Abstract

The SU8-based UV-LIGA process, which combines lithography with electroforming, is a low cost fabrication method for producing MEMS and precision engineering parts. With lower surface energy and friction coefficient, these micro parts are required for applications such as micro gears and movable microstructures. This paper introduces a technique to fabricate Ni-PTFE micro parts using special treated galvanic bath. The experiment results show that the composite electroforming process is robust and the fabricated Ni-PTFE parts have good tribological properties.

Paper Details

Date Published: 30 December 2008
PDF: 7 pages
Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 72690O (30 December 2008); doi: 10.1117/12.810665
Show Author Affiliations
Yuhua Guo, The Chinese Univ. of Hong Kong (Hong Kong, China)
Yingnan Wang, The Chinese Univ. of Hong Kong (Hong Kong, China)
Tom C. Kong, The Chinese Univ. of Hong Kong (Hong Kong, China)
R. Du, The Chinese Univ. of Hong Kong (Hong Kong, China)


Published in SPIE Proceedings Vol. 7269:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
Jung-Chih Chiao; Alex J. Hariz; David V. Thiel; Changyi Yang, Editor(s)

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