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Proceedings Paper

Transparency conversion mechanism and laser induced fast response of bimetallic Bi/In thin film
Author(s): Sihai Cao; Chuanfei Guo; Yongsheng Wang; Junjie Miao; Zhuwei Zhang; Qian Liu
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Paper Abstract

Transparency conversion mechanism and laser induced fast response velocity of bimetallic Bi/In thin film is studied. Heat-treatment and laser exposure with different pulse width induced transparency is investigated by using ultraviolet-visible (UV-VIS) spectrometer, X-ray diffraction (XRD), Auger Electron Scan (AES), microscope and field emission scanning electron microscopy (FESEM). Research results show that oxidation is regarded as the reason for heat treated and long-pulsed laser exposure induced transparency conversion. Laser ablation is demonstrated to be the main reason for short-pulsed (~7ns) laser induced transparency conversion. For Bi/In thin film covered with a protection layer of (ZnS)0.85(SiO2)0.15 thin film, it exhibit fast response as fast as less than 100ns. The conclusions contribute to understanding and development of materials for thermal resist, photomask, optical storage medium and transparent conductive oxide with better performance.

Paper Details

Date Published: 30 December 2008
PDF: 9 pages
Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 726910 (30 December 2008); doi: 10.1117/12.810615
Show Author Affiliations
Sihai Cao, National Ctr. for Nanoscience and Technology, China (China)
Chuanfei Guo, National Ctr. for Nanoscience and Technology, China (China)
Yongsheng Wang, National Ctr. for Nanoscience and Technology, China (China)
Junjie Miao, National Ctr. for Nanoscience and Technology, China (China)
Zhuwei Zhang, National Ctr. for Nanoscience and Technology, China (China)
Qian Liu, National Ctr. for Nanoscience and Technology, China (China)


Published in SPIE Proceedings Vol. 7269:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
Jung-Chih Chiao; Alex J. Hariz; David V. Thiel; Changyi Yang, Editor(s)

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