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Proceedings Paper

A smart resonating micro-cantilever in MEMS gas sensor: improved design
Author(s): Jia Hao Zhao; Shi Jie Yu; Ke Li; Qin Zhou; Zheng You
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Paper Abstract

A smart micro-cantilever in a creative gas sensor with high sensitivity is presented. The resonance frequency shifting of the cantilever is monitored to detect its mass change caused by adsorption of certain gas molecules. The cantilever has a more compact MEMS structure and the smart functions because of the sensor with a self-actuating and detecting (SAD) vibration system, which is integration of a vibration actuating system and a detecting system. The model of the smart beam is analyzed by computer simulation. Design rules of the beam are obtained according to related discuss with function goal of extremely rare gas detection. After fabrication and test of the smart cantilever, an improved solution of the smart cantilever is introduced by comparison study of the computer simulation and experiment results of the fabricated beam.

Paper Details

Date Published: 30 December 2008
PDF: 8 pages
Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72680T (30 December 2008); doi: 10.1117/12.810579
Show Author Affiliations
Jia Hao Zhao, Tsinghua Univ. (China)
Shi Jie Yu, Tsinghua Univ. (China)
Ke Li, Tsinghua Univ. (China)
Qin Zhou, Tsinghua Univ. (China)
Zheng You, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 7268:
Smart Structures, Devices, and Systems IV
Said Fares Al-Sarawi; Vijay K. Varadan; Neil Weste; Kourosh Kalantar-Zadeh, Editor(s)

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