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Proceedings Paper

Parallel femtosecond laser processing with a computer-generated hologram
Author(s): S. Hasegawa; Y. Hayasaki
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Paper Abstract

Femtosecond laser processing acquires futures of high throughput and high light-use efficiency by using a computer-generated hologram. In the holographic femtosecond laser processing, a precise control of diffraction peaks is indispensable to fabricate enormous numbers of nanometer-scale structures simultaneously. The computer-optimized hologram has high uniformity of the diffraction peaks in the computer reconstruction. However, the uniformity decreases due to spatial and temporal properties of the optical system. We propose some optimization methods of the hologram to improve the uniformity and demonstrate the processing performance.

Paper Details

Date Published: 24 February 2009
PDF: 8 pages
Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72011D (24 February 2009); doi: 10.1117/12.810234
Show Author Affiliations
S. Hasegawa, Utsunomiya Univ. (Japan)
Y. Hayasaki, Utsunomiya Univ. (Japan)

Published in SPIE Proceedings Vol. 7201:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
Michel Meunier; Andrew S. Holmes; Hiroyuki Niino; Bo Gu, Editor(s)

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