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Proceedings Paper

Thin layer ablation with lasers of different beam profiles: energy efficiency and over filling factor
Author(s): Keming Du
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Paper Abstract

Structuring and patterning of thin layer via selective laser ablation is one of the key technologies in production of display and photovoltaic. Concurrently, there are two ablation processes used in production of thin film solar cells: Scribing via selective ablation and edge isolation via deletion. The common laser beams have circular cross section. Furthermore, the most currently lasers of high beam quality have Gaussian beam profile. Because of threshold behaviour Gaussian beam profile is not favourable for ablation process. On the other side there are emerging laser concepts which deliver rectangular or saqure top-hat beams with high beam quality. In this paper we will discuss the fundamentals of ablation processes with circular Gaussian beams, one dimensional top-hat beams and two dimensional square top-hat beams. The major issues will be the energy efficiency of the process and the area over filling aspect for the different beam profiles. The corresponding experimental results will be presented.

Paper Details

Date Published: 24 February 2009
PDF: 9 pages
Proc. SPIE 7202, Laser-based Micro- and Nanopackaging and Assembly III, 72020Q (24 February 2009); doi: 10.1117/12.810158
Show Author Affiliations
Keming Du, EdgeWave GmbH (Germany)

Published in SPIE Proceedings Vol. 7202:
Laser-based Micro- and Nanopackaging and Assembly III
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Willem Hoving; Jun Amako, Editor(s)

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