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Proceedings Paper

Multiscale modeling of phase changes during femtosecond laser metal interaction
Author(s): Xin Li; Lan Jiang; Hai-Lung Tsai
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Paper Abstract

A multiscale model is developed to study to the femtosecond laser single pulse and pulse train processing of the metal films. In our model, molecular dynamics simulation combined with the improved two-temperature model is employed in the ablation area and the improved two-temperature model is applied in heat-affected zone. This paper extends the improved two-temperature model to describe higher laser fluences processing by introducing the phase change. The phase change mechanisms of the non-equilibrium thermal melting and vaporization are both analyzed, which has a strong impact on the lattice temperature evaluation. The model can simulate phase change process of gold with higher accuracy. It is demonstrated that the pulse train could improve the fabrication accuracy, repeatability, and controllability.

Paper Details

Date Published: 24 February 2009
PDF: 16 pages
Proc. SPIE 7202, Laser-based Micro- and Nanopackaging and Assembly III, 72020B (24 February 2009); doi: 10.1117/12.810022
Show Author Affiliations
Xin Li, Beijing Institute of Technology (China)
Lan Jiang, Beijing Institute of Technology (China)
Hai-Lung Tsai, Missouri Univ. of Science and Technology (United States)


Published in SPIE Proceedings Vol. 7202:
Laser-based Micro- and Nanopackaging and Assembly III
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Willem Hoving; Jun Amako, Editor(s)

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