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Proceedings Paper

Application of diffractive optical elements for inspection of complicated through holes
Author(s): Yuri V. Chugui; Yuri A. Lemeshko; Peter S. Zav'yalov
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Paper Abstract

The inspection of geometrical parameters of through holes with different configurations is one of the urgent tasks in industry. The majority of the existing noncontact inspection methods doesn't allow measuring the holes of complicated (noncylindrical) configurations with good performances. Two simple developed methods based on diffractive optical elements (DOEs) make possible to inspect the through holes (with the diameter from 5 to 100 mm) both cylindrical and complicated configurations with acceptable lateral and axial (longitudinal) resolution. First method, based on the scanning of inner hole surface by light ring, takes a mechanical displacement of the inspected article along its axis. The second holes inspection method uses the DOE as the diffractive focuser, which generates N light rings simultaneously along the hole axis with ring spacing &Dgr;z. In this case no need for mechanical displacement of inspected articles, output image contains full measuring information about 3D article hole configuration. We have fabricated some binary DOEs using circular laser writing system CLWS-300, developed and produced at the TDI SIE SB RAS. The obtained results have been used under the development of universal automatic inspection system of nuclear reactors fuel assemblies spacer grids.

Paper Details

Date Published: 12 January 2009
PDF: 10 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713332 (12 January 2009); doi: 10.1117/12.810014
Show Author Affiliations
Yuri V. Chugui, Technological Design Institute of Scientific Instrument Engineering (Russian Federation)
Novosibirsk State Univ. (Russian Federation)
Yuri A. Lemeshko, Technological Design Institute of Scientific Instrument Engineering (Russian Federation)
Peter S. Zav'yalov, Technological Design Institute of Scientific Instrument Engineering (Russian Federation)


Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)

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