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Proceedings Paper

In situ measurement of gas diffusion properties of sealing polymers for MEMS packages by an optical gas leak test
Author(s): Changsoo Jang; Arindam Goswami; Bongtae Han
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Paper Abstract

A novel inverse approach based on an optical leak test is developed and implemented for in-situ measurement of gas diffusion properties of polymeric seals used in MEMS packages. Cavity pressure evolution during a leak test is documented as a function of time using laser-based interferometry, and the diffusion properties of a polymeric seal are subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse analysis is established considering three diffusion regimes that characterize the leak behavior through a polymer seal. The method is demonstrated successfully to determine the helium diffusivity and solubility of the polymeric seal used in a package.

Paper Details

Date Published: 9 February 2009
PDF: 11 pages
Proc. SPIE 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII, 720607 (9 February 2009); doi: 10.1117/12.810001
Show Author Affiliations
Changsoo Jang, Univ. of Maryland, College Park (United States)
Arindam Goswami, Univ. of Maryland, College Park (United States)
Bongtae Han, Univ. of Maryland, College Park (United States)


Published in SPIE Proceedings Vol. 7206:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
Richard C. Kullberg; Rajeshuni Ramesham, Editor(s)

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