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Proceedings Paper

Fabrication of metallic nanodot structures using focused ion beam (FIB) and electron beam-induced deposition for plasmonic waveguides
Author(s): Anuj Dhawan; Michael Gerhold; Phillip Russell; Tuan Vo-Dinh; Donovan Leonard
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Paper Abstract

Fabrication of a linear array of metallic nanodots and nanopillars for plasmonic waveguides is reported in this paper by two different processes - FIB milling of deposited thin films and electron beam-induced deposition of metallic nanostructures from a organometallic precursor gas introduced into the chamber. In the first FIB fabrication method, metallic nanorods and nanopillars were fabricated by depositing a 30-150 nm layer of a metallic (gold or silver) film on a planar substrate and subsequently employing FIB milling to pattern out the metallic nanopillars from the film. Employing FIB allowed formation of nanostructures such that the plasmon resonances associated with the nanostructures could be engineered and precisely controlled by controlling the nanostructure size and shape. Multistep FIB fabrication procedures were developed to form the nanostructures of complex geometries on planar substrates. The second fabrication processed used to create nanodots and nanopillars for plasmonic waveguides discussed in this paper is direct deposition of metal nanostructures, created when an electron beam (e-beam) is used to dissociate metal from an organometallic precursor gas in a predefined reaction region. Ionization energy required for decomposition of the Au precursor, i.e. Dimethyl Au (III) Fluoro Actylacetonate, is matched with that of the secondary electrons (between 5-50 eV) that are generated by exposing the substrate to a focused electron beam.

Paper Details

Date Published: 18 February 2009
PDF: 11 pages
Proc. SPIE 7224, Quantum Dots, Particles, and Nanoclusters VI, 722414 (18 February 2009); doi: 10.1117/12.809927
Show Author Affiliations
Anuj Dhawan, U.S. Army Research Office (United States)
Fitzpatrick Institute for Photonics, Duke Univ. (United States)
Michael Gerhold, U.S. Army Research Office (United States)
Fitzpatrick Institute for Photonics, Duke Univ. (United States)
Phillip Russell, Appalachian State Univ. (United States)
Tuan Vo-Dinh, Fitzpatrick Institute for Photonics, Duke Univ. (United States)
Donovan Leonard, Appalachian State Univ. (United States)


Published in SPIE Proceedings Vol. 7224:
Quantum Dots, Particles, and Nanoclusters VI
Kurt G. Eyink; Frank Szmulowicz; Diana L. Huffaker, Editor(s)

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