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Proceedings Paper

Terahertz quantum cascade laser integration with on-chip micromachined rectangular waveguides
Author(s): Michael C. Wanke; Christopher D. Nordquist; Michael J. Cich; Adam M. Rowen; Christian L. Arrington; Mark Lee; Albert D. Grine; Chuck T. Fuller; John L. Reno; Erik W. Young
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Paper Abstract

Integration of THz quantum cascade lasers (QCLs) with single-mode 75 μm x 37 μm rectangular waveguide components, including horn antennas, couplers, and bends, for operation at 3 THz has been designed and fabricated using thick gold micromachining. Measurements on the isolated waveguide components exhibit fairly low loss and integration with THz QCLs has been demonstrated. This technology offers the potential for realizing miniature integrated systems operating in the 3 THz frequency range.

Paper Details

Date Published: 12 February 2009
PDF: 11 pages
Proc. SPIE 7215, Terahertz Technology and Applications II, 721504 (12 February 2009); doi: 10.1117/12.809853
Show Author Affiliations
Michael C. Wanke, Sandia National Labs. (United States)
Christopher D. Nordquist, Sandia National Labs. (United States)
Michael J. Cich, Sandia National Labs. (United States)
Adam M. Rowen, Sandia National Labs. (United States)
Christian L. Arrington, LMATA Government Services, LLC (United States)
Mark Lee, Sandia National Labs. (United States)
Albert D. Grine, LMATA Government Services, LLC (United States)
Chuck T. Fuller, Sandia National Labs. (United States)
John L. Reno, Sandia National Labs. (United States)
Erik W. Young, Lumileds (United States)


Published in SPIE Proceedings Vol. 7215:
Terahertz Technology and Applications II
Kurt J. Linden; Laurence P. Sadwick; Créidhe M. O'Sullivan, Editor(s)

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