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Proceedings Paper

Thermally actuated microshutter for MOEMS applications
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Paper Abstract

This paper will investigate a novel thermally actuated micro-shutter design for micro-optical-electro-mechanical system (MOEMS) applications. The use of actuators in optical systems has improved with new developments in micro-electromechanical systems (MEMS) designs for use as components in optical systems. Thermal actuators provide a novel approach to scaling MOEMS to reduce size, weight and power of optical systems. Through the investigation of an aluminum electro-thermal actuator, we developed an in-house fabrication method which operates at less than one volt to aid in reducing the size, weight, and power of the optical system. This paper discusses several challenges and opportunities that may arise from the fabrication of thermally actuated micro-shutter designs which can help improve the actuator's uniformity, reproducibility, and reliability. In addition, we discuss the characterization of the thermal actuator micro-shutter to include mechanical, electrical and optical properties. The "switching" speed of the thermal actuator will also be assessed from a scaling perspective to determine usability.

Paper Details

Date Published: 24 February 2009
PDF: 10 pages
Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 720809 (24 February 2009); doi: 10.1117/12.809776
Show Author Affiliations
Derrick Langley, Air Force Institute of Technology (United States)
LaVern A. Starman, Air Force Institute of Technology (United States)
Ronald A. Coutu Jr., Air Force Institute of Technology (United States)
Stanley Rogers, Air Force Research Lab. (United States)

Published in SPIE Proceedings Vol. 7208:
MOEMS and Miniaturized Systems VIII
David L. Dickensheets; Harald Schenk; Wibool Piyawattanametha, Editor(s)

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