Share Email Print
cover

Proceedings Paper

Generation of programmable temporal pulse shape and applications in micromachining
Author(s): X. Peng; B. Jordens; A. Hooper; B. W. Baird; W. Ren; L. Xu; L. Sun
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this paper we presented a pulse shaping technique on regular solid-state lasers and the application in semiconductor micromachining. With a conventional Q-switched laser, all of the parameters can be adjusted over only limited ranges, especially the pulse width and pulse shape. However, some laser link processes using traditional laser pulses with pulse widths of a few nanoseconds to a few tens of nanoseconds tend to over-crater in thicker overlying passivation layers and thereby cause IC reliability problems. Use of a laser pulse with a special shape and a fast leading edge, such as tailored pulse, is one technique for controlling link processing. The pulse shaping technique is based on light-loop controlled optical modulation to shape conventional Q-switched solid-state lasers. One advantage of the pulse shaping technique is to provide a tailored pulse shape that can be programmed to have more than one amplitude value. Moreover, it has the capability of providing programmable tailored pulse shapes with discrete amplitude and time duration components. In addition, it provides fast rising and fall time of each pulse at fairly high repetition rate at 355nm with good beam quality. The regular-to-shaped efficiency is up to 50%. We conclude with a discussion of current results for laser processing of semiconductor memory link structures using programmable temporal pulse shapes. The processing experiments showed promising results with shaped pulse.

Paper Details

Date Published: 27 February 2009
PDF: 9 pages
Proc. SPIE 7193, Solid State Lasers XVIII: Technology and Devices, 719324 (27 February 2009); doi: 10.1117/12.809759
Show Author Affiliations
X. Peng, Electro Scientific Industries, Inc. (United States)
B. Jordens, Electro Scientific Industries, Inc. (United States)
A. Hooper, Electro Scientific Industries, Inc. (United States)
B. W. Baird, Electro Scientific Industries, Inc. (United States)
W. Ren, Electro Scientific Industries, Inc. (United States)
L. Xu, Electro Scientific Industries, Inc. (United States)
L. Sun, Electro Scientific Industries, Inc. (United States)


Published in SPIE Proceedings Vol. 7193:
Solid State Lasers XVIII: Technology and Devices
W. Andrew Clarkson; Norman Hodgson; Ramesh K. Shori, Editor(s)

© SPIE. Terms of Use
Back to Top