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Proceedings Paper

Initial performance results for high-aspect ratio gold MEMS deformable mirrors
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Paper Abstract

The fabrication and initial performance results of high-aspect ratio 3-dimensional Micro-Electro-Mechanical System (MEMS) Deformable Mirrors (DM) for Adaptive Optics (AO) will be discussed. The DM systems were fabricated out of gold, and consist of actuators bonded to a continuous face sheet, with different boundary conditions. DM mirror displacements vs. voltage have been measured with a white light interferometer and the corresponding results compared to Finite Element Analysis (FEA) simulations. Interferometer scans of a DM have shown that ~9.4um of stroke can be achieved with low voltage, thus showing that this fabrication process holds promise in the manufacturing of future MEMS DM's for the next generation of extremely large telescopes.

Paper Details

Date Published: 23 February 2009
PDF: 10 pages
Proc. SPIE 7209, MEMS Adaptive Optics III, 72090O (23 February 2009); doi: 10.1117/12.809617
Show Author Affiliations
Bautista Fernández, Univ. of California, Santa Cruz (United States)
Joel Kubby, Univ. of California, Santa Cruz (United States)

Published in SPIE Proceedings Vol. 7209:
MEMS Adaptive Optics III
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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