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Proceedings Paper

Novel construction of a deformable mirror for laser beam shaping
Author(s): Claudia Bruchmann; Ramona Eberhardt; Erik Beckert; Thomas Peschel; Steffen Gramens; Sylvia E. Gebhardt; Andreas Tünnermann
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Paper Abstract

This paper reports on a novel construction of a deformable mirror for laser beam shaping. The deformable mirror is actuated by screen-printed thick film piezoceramic unimorphs based on lead zirconate titanate (PZT). Different actuator layouts are realized and will be presented. We use Low Temperature Cofired Ceramics (LTCC) as a substrate material with a metallization as reflective surface. LTCC offers easy integration of holding structures. The reflective mirror surface is electroplated copper. After deposition, the copper layer is diamond machined to achieve excellent optical surface quality <10 nm (rms). We build deformable mirrors with 1, 13 and 19 actuators and a total stroke of more than 20 μm and characterize them with a wave front sensor.

Paper Details

Date Published: 23 February 2009
PDF: 11 pages
Proc. SPIE 7209, MEMS Adaptive Optics III, 72090B (23 February 2009); doi: 10.1117/12.809557
Show Author Affiliations
Claudia Bruchmann, Friedrich Schiller Univ. of Jena (Germany)
Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Ramona Eberhardt, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Erik Beckert, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Thomas Peschel, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Steffen Gramens, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Sylvia E. Gebhardt, Fraunhofer Institute for Ceramic Technologies and Systems (Germany)
Andreas Tünnermann, Friedrich Schiller Univ. of Jena (Germany)
Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 7209:
MEMS Adaptive Optics III
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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