Share Email Print
cover

Proceedings Paper

Green light emission from selectively grown InGaN multiple quantum well stripes oriented along [11-20] direction
Author(s): W. Feng; V. V. Kuryatkov; M. Pandikunta; S. A. Nikishin; M. Holtz
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

InGaN multiple quantum wells (MQWs) with green light emission have been grown on GaN stripes oriented along the [11-20] direction by selective metal-organic vapor phase epitaxy (MOVPE). Several different window widths were designed in the SiO2 mask. Completed pyramidal InGaN stripes with flat and smooth {1-101} sidewall were produced on 2-μm windows while trapezoidal stripes with both {1-101} sidewall and (0001) top surface were obtained on the 5-μm windows. The former has uniform CL emissions at 500 nm on the {1-101} sidewall and at 550 nm on the narrow ridge. The latter exhibits similar CL emissions at 500 nm on the sidewall and at 570 nm on the top surface. These wavelength shifts relative to the CL spectrum peak (450 nm) from the reference region are attributed to thickness enhancement and indium enrichment in selective MOVPE. The short-wavelength shoulder near 500 nm in the spectrum from the ridge of the completed pyramidal strip is attributed to overlapping excitation of the sidewall by the SEM incident beam.

Paper Details

Date Published: 19 February 2009
PDF: 9 pages
Proc. SPIE 7216, Gallium Nitride Materials and Devices IV, 721622 (19 February 2009); doi: 10.1117/12.809179
Show Author Affiliations
W. Feng, Texas Tech Univ. (United States)
V. V. Kuryatkov, Texas Tech Univ. (United States)
M. Pandikunta, Texas Tech Univ. (United States)
S. A. Nikishin, Texas Tech Univ. (United States)
M. Holtz, Texas Tech Univ. (United States)


Published in SPIE Proceedings Vol. 7216:
Gallium Nitride Materials and Devices IV
Hadis Morkoç; Cole W. Litton; Jen-Inn Chyi; Yasushi Nanishi; Joachim Piprek; Euijoon Yoon, Editor(s)

© SPIE. Terms of Use
Back to Top