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Proceedings Paper

Biosensing microsystem platforms based on the integration of Si Mach-Zehnder interferometer, microfluidics and grating couplers
Author(s): L. M. Lechuga; K. Zinoviev; L. Fernández; J. Elizalde; O. E. Hidalgo; C. Dominguez
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Paper Abstract

We have achieved the design, fabrication and packaging of microfluidic networks with photonic sensors for novel labon- chip platforms which incorporate the on-chip biosensing detection. As sensors, we used an integrated Mach-Zehnder interferometer (MZI) based on TIR waveguides (Si/SiO2/Si3N4) of micro/nanodimensions for evanescent field detection of biomolecular interactions onto the sensing areas. For the lab-on-a-chip development, the biosensors have been integrated with a 3D microfluidic polymer network. In addition, we have developed a novel hybrid device for coupling light into the waveguides of the Mach-Zehnder sensor. The coupling hybrid device is composed of a thin film of diffraction gratings fixed to a polydimethylsiloxane film. The optical characterization has shown the excellent compatibility and integration between fabrication technologies of silicon MZI, SU-8 polymer microfluidic network and mountable grating couplers.

Paper Details

Date Published: 17 February 2009
PDF: 8 pages
Proc. SPIE 7220, Silicon Photonics IV, 72200L (17 February 2009); doi: 10.1117/12.809166
Show Author Affiliations
L. M. Lechuga, Research Ctr. on Nanoscience and Nanotechnology (CIN2) (Spain)
K. Zinoviev, Instituto de Microelectrónica de Barcelona (Spain)
L. Fernández, IKERLAN S. Coop (Spain)
J. Elizalde, IKERLAN S. Coop (Spain)
O. E. Hidalgo, Research Ctr. on Nanoscience and Nanotechnology (CIN2) (Spain)
C. Dominguez, Instituto de Microelectrónica de Barcelona (Spain)

Published in SPIE Proceedings Vol. 7220:
Silicon Photonics IV
Joel A. Kubby; Graham T. Reed, Editor(s)

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