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Proceedings Paper

Diffraction gratings for compact integrated optical structures
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Paper Abstract

Diffraction gratings used in various applications for compact optical devices. We used different technologies for this task: deep-UV lithography, FIB milling, e-beam lithography, and hot embossing/nanoimprinting technology. We analyzed advantages and disadvantages of each fabrication technology.

Paper Details

Date Published: 24 February 2009
PDF: 9 pages
Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 72050O (24 February 2009); doi: 10.1117/12.809029
Show Author Affiliations
Ildar Salakhutdinov, Wayne State Univ. (United States)
Gregory W. Auner, Wayne State Univ. (United States)


Published in SPIE Proceedings Vol. 7205:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
Thomas J. Suleski; Winston V. Schoenfeld; Jian Jim Wang, Editor(s)

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