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Proceedings Paper

A VCSEL-based miniature laser-self-mixing interferometer with integrated optical and electronic components
Author(s): Armand Pruijmboom; Silvia Booij; Marcel Schemmann; Klaus Werner; Pieter Hoeven; Henri van Limpt; Steffan Intemann; Rafael Jordan; Thomas Fritzsch; Hermann Oppermann; Michel Barge
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Paper Abstract

It has been previously published how, using two separate Vertical-Cavity-Surface-Emitting-Lasers (VCSELs), a miniature laser-Doppler interferometer can be made for quasi-three-dimensional displacement measurements. For the use in consumer applications as PC-mice, the manufacturing costs of such sensors need to be minimized. This paper describes the fabrication of a low-cost laser-self-mixing sensor by integrating silicon and GaAs components using flip-chip technology. Wafer-scale lens replication on GaAs wafers is used to achieve integrated optics. In this way a sensor was realized without an external lens and that uses only a single GaAs VCSEL crystal, while maintaining its quasi-three-dimensional sensor capabilities.

Paper Details

Date Published: 12 February 2009
PDF: 12 pages
Proc. SPIE 7221, Photonics Packaging, Integration, and Interconnects IX, 72210S (12 February 2009); doi: 10.1117/12.808810
Show Author Affiliations
Armand Pruijmboom, Philips Laser Sensors (Netherlands)
Silvia Booij, Philips Laser Sensors (Netherlands)
Marcel Schemmann, Philips Laser Sensors (Netherlands)
Klaus Werner, Philips Laser Sensors (Netherlands)
Pieter Hoeven, Philips Laser Sensors (Netherlands)
Henri van Limpt, Philips Laser Sensors (Netherlands)
Steffan Intemann, Philips Technologie GmbH (Germany)
Rafael Jordan, Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration (Germany)
Thomas Fritzsch, Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration (Germany)
Hermann Oppermann, Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration (Germany)
Michel Barge, Heptagon Oy (Switzerland)


Published in SPIE Proceedings Vol. 7221:
Photonics Packaging, Integration, and Interconnects IX
Alexei L. Glebov; Ray T. Chen, Editor(s)

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