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Proceedings Paper

Nanorod measurement-layer separate structure for nanorod-character measurement, simulation, and application as sensor devices
Author(s): Myoung-Kun Leem; Jin-Uk Park; Chang-Man Kim; Kyu-Jin Kim; Se-Hyuk Yeom; Woo-Youp Choi; Won-Seok Kang; Jae-Ho Kim; Shin-Won Kang
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Paper Abstract

This paper reported the simple nanorod characteristic measurement method by layer separated structure. The structures are designed by the ANSYS simulation and they are fabricated by semiconductor fabrications. In the experiment, dielectrophoresis (DEP) principle is used to assemble nanorods which are synthesized by electrochemical deposition (ECD) method. However, it is difficult to make devices without assembly process because nanorods which are synthesized by the ECD method are dispersed in the medium. Therefore, this paper was studied to design and fabricate the nanorod assembly-layer and measurement-layer separation. After assembling the nanorods, I-V characteristics of the nanorods were measured.

Paper Details

Date Published: 24 February 2009
PDF: 8 pages
Proc. SPIE 7204, Micromachining and Microfabrication Process Technology XIV, 72040P (24 February 2009); doi: 10.1117/12.808673
Show Author Affiliations
Myoung-Kun Leem, Kyungpook National Univ. (Korea, Republic of)
Jin-Uk Park, Kyungpook National Univ. (Korea, Republic of)
Chang-Man Kim, Kyungpook National Univ. (Korea, Republic of)
Kyu-Jin Kim, Kyungpook National Univ. (Korea, Republic of)
Se-Hyuk Yeom, Kyungpook National Univ. (Korea, Republic of)
Woo-Youp Choi, Kyungpook National Univ. (Korea, Republic of)
Won-Seok Kang, Ajou Univ. (Korea, Republic of)
Jae-Ho Kim, Ajou Univ. (Korea, Republic of)
Shin-Won Kang, Kyungpook National Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7204:
Micromachining and Microfabrication Process Technology XIV
Mary-Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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