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Proceedings Paper

Deep trenches fabricated by laser-induced backside wet etching for guiding light
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Paper Abstract

By laser-induced backside wet etching (LIBWE), we can fabricate microfluidic channels on silica glasses. These channels have smooth bottom surfaces that can be combined with various optical detection techniques. Antiresonant guided optical wave (ARGOW) is a concept for guiding light in the system composed of a low refractive index medium surrounded by a medium with higher refractive index. The ARGOW was examined by using the wide channels (length: 17 mm, width: 1 mm, depth: 45 μm) prepared by LIBWE, whose bottom surface showed root-mean-square (RMS) roughness less than 100 nm. The LIBWE can fabricate deep trenches with high aspect ratio (~57 (length: 1mm, width: 10 μm, depth: 566 μm)). By using such deep channels, ARGOW system within a plane parallel to the top surface of glass can be fabricated. In this work, surface roughness of the sidewall of deep trenches prepared with LIBWE was evaluated, and the possibility of utilization for guiding light is discussed.

Paper Details

Date Published: 24 February 2009
PDF: 9 pages
Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010C (24 February 2009); doi: 10.1117/12.808637
Show Author Affiliations
Tadatake Sato, National Institute of Advanced Industrial Science and Technology (Japan)
Amit Pratap Singh, National Institute of Advanced Industrial Science and Technology (Japan)
Ryozo Kurosaki, National Institute of Advanced Industrial Science and Technology (Japan)
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshizo Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 7201:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
Michel Meunier; Andrew S. Holmes; Hiroyuki Niino; Bo Gu, Editor(s)

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