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Proceedings Paper

Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy
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Paper Abstract

Two-photon polymerization (TPP) is an enabling technology that allows fast prototyping of parts with sub-100 nm resolution. Due to its ability to fabricate microstructures with arbitrary three-dimensional geometries, TPP has been employed in diverse fields such as photonics, microelectronics, microelectromechanical systems, and microfluidics. However, no information is available to date that microscopically correlates the experimental conditions used in TPP with the properties of the ultimate microstructure. We present a study where the distribution of polymer cross-linking in three-dimensional microstructures fabricated by TPP is visualized by means of nonlinear microscopy. In particular, coherent anti-Stokes Raman scattering (CARS) microscopy is employed to image polymer microstructures with chemical specificity. The characterization of the microstructures based on the acquired images permits rational optimization of the TPP process.

Paper Details

Date Published: 24 February 2009
PDF: 10 pages
Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010Q (24 February 2009); doi: 10.1117/12.808269
Show Author Affiliations
Tommaso Baldacchini, Newport Corp. (United States)
Max Zimmerley, Univ. of California, Irvine (United States)
Eric O. Potma, Univ. of California, Irvine (United States)
Ruben Zadoyan, Newport Corp. (United States)


Published in SPIE Proceedings Vol. 7201:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
Michel Meunier; Andrew S. Holmes; Hiroyuki Niino; Bo Gu, Editor(s)

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