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Proceedings Paper

Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement
Author(s): D. Jung; D. Kallweit; T. Sandner; H. Conrad; H. Schenk; H. Lakner
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Paper Abstract

A technology approach is presented which enables an initial permanent counter electrode deflection of planar out of plane comb drive actuators allowing quasistatic operation of an electrostatic microscanner. The device is assembled by mounting a top wafer with salient stamps onto a mirror wafer. The commonly fix in plane counter electrode parts on the mirror wafer are connected to deflectable platforms via a mechanical structure of coupled hinges. During the wafers assembly the down pressing stamps displace the platforms and result in a predefined permanent out of plane counter comb deflection.

Paper Details

Date Published: 24 February 2009
PDF: 11 pages
Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080A (24 February 2009); doi: 10.1117/12.808210
Show Author Affiliations
D. Jung, Fraunhofer Institute for Photonic Microsystems (Germany)
Dresden Univ. of Technology (Germany)
D. Kallweit, Fraunhofer Institute for Photonic Microsystems (Germany)
T. Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
H. Conrad, Fraunhofer Institute for Photonic Microsystems (Germany)
Dresden Univ. of Technology (Germany)
H. Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)
H. Lakner, Fraunhofer Institute for Photonic Microsystems (Germany)
Dresden Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 7208:
MOEMS and Miniaturized Systems VIII
David L. Dickensheets; Harald Schenk; Wibool Piyawattanametha, Editor(s)

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