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Proceedings Paper

Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer
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Paper Abstract

Position feedback of resonant scanning micromirrors plays a key role for various applications like portable laser projection displays or scanning grating spectrometers. The SOI device layer without an additional surface implantation is used for the piezoresistive sensor design. It assures the full compatibility to microscanner technology and requires no additional technological efforts. The necessary asymmetry of the current field density is achieved by the geometrical design of the sensor and its contacting. Integrated 2D position sensors with amplitude sensitivities of 0.42mV/V° were fabricated. FEA simulation and measured data correlates well with variations of ≤ 20.4%.

Paper Details

Date Published: 18 February 2009
PDF: 10 pages
Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 720808 (18 February 2009); doi: 10.1117/12.808151
Show Author Affiliations
Jan Grahmann, Fraunhofer Institute for Photonic Microsystems (Germany)
Holger Conrad, Technische Univ. Dresden (Germany)
Thilo Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
Thomas Klose, Fraunhofer Institute for Photonic Microsystems (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)

Published in SPIE Proceedings Vol. 7208:
MOEMS and Miniaturized Systems VIII
David L. Dickensheets; Harald Schenk; Wibool Piyawattanametha, Editor(s)

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