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Proceedings Paper

Dimensional nanometrology at the National Physical Laboratory
Author(s): Andrew Yacoot; Richard Leach; Ben Hughes; Claudiu Giusca; Christopher Jones; Alan Wilson
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Paper Abstract

The growth in nanotechnology has led to an increased requirement for traceable dimensional measurements of nanometre-sized objects and micrometre-sized objects with nanometre tolerances. To meet this challenge NPL has developed both purpose built instrumentation and added metrology to commercially available equipment. This paper describes the development and use of a selection of these instruments that include: atomic force microscopy, x-ray interferometry, a low force balance, a micro coordinate measuring machine and an areal surface texture measuring instrument.

Paper Details

Date Published: 12 January 2009
PDF: 6 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713345 (12 January 2009); doi: 10.1117/12.807994
Show Author Affiliations
Andrew Yacoot, National Physical Lab. (United Kingdom)
Richard Leach, National Physical Lab. (United Kingdom)
Ben Hughes, National Physical Lab. (United Kingdom)
Claudiu Giusca, National Physical Lab. (United Kingdom)
Christopher Jones, National Physical Lab. (United Kingdom)
Alan Wilson, National Physical Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology
Jiubin Tan; Xianfang Wen, Editor(s)

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