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Proceedings Paper

Wire-grid polarizer for the UV spectral region
Author(s): Thomas Weber; Hans-Jörg Fuchs; Holger Schmidt; Ernst-Bernhard Kley; Andreas Tünnermann
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Paper Abstract

In this work we present a metal wire grid polarizer for the UV spectral region. The period of the aluminum grating is 100 nm. The grating was fabricated using a spatial frequency doubling technique. The process consist of electron-beamlithography, sputter coating and various ion-beam- and ICP etching steps. The features of the fabricated aluminum wires fulfill the theoretical demands with a height of 150 nm and a width of 35 nm. Optical parameters of the grating at 250 nm wavelength are 42% transmittance and an extinction ratio of almost 15. The optical parameters are even improved with the wavelength.

Paper Details

Date Published: 19 February 2009
PDF: 8 pages
Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720504 (19 February 2009); doi: 10.1117/12.807993
Show Author Affiliations
Thomas Weber, Friedrich-Schiller-Univ. Jena (Germany)
Hans-Jörg Fuchs, Friedrich-Schiller-Univ. Jena (Germany)
Holger Schmidt, Friedrich-Schiller-Univ. Jena (Germany)
Ernst-Bernhard Kley, Friedrich-Schiller-Univ. Jena (Germany)
Andreas Tünnermann, Friedrich-Schiller-Univ. Jena (Germany)


Published in SPIE Proceedings Vol. 7205:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
Thomas J. Suleski; Winston V. Schoenfeld; Jian Jim Wang, Editor(s)

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