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Proceedings Paper

Design of a probe for two-dimensional small angle detection
Author(s): Haixia He; Xuanze Wang; Yuning Zhong; Liangen Yang; Hongduan Cao
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Paper Abstract

A novel two-dimensional small angle probe is introduced, which is based on principle of auto-collimation and utilizes quadrant Si-photoelectric detector (QPD) as detection device. AC modulation, AC magnification and absolute value demodulation are incorporated to restrain the DC excursion caused by background light and noise etc and to improve the sensitivity and stability of angle detection. To ensure that while the laser is shining, the current signal (converted into voltage signal) of QPD also is linear to the AC modulation voltage, this paper adopted AC modulation signal (5400Hz) with a DC offset. AC magnification circuit with reasonable parameters is designed to inhibit DC drift and the impact of industrial frequency noise and to ensure good amplification to signal frequency at the same time. A piezoelectric-driven micro-angle generator is designed to demarcate the angle. The calibration data are input to single chip, and the measurement of angles can be shown in SMC1602A.

Paper Details

Date Published: 12 January 2009
PDF: 9 pages
Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71333W (12 January 2009); doi: 10.1117/12.807698
Show Author Affiliations
Haixia He, Hubei Univ. of Technology (China)
Xuanze Wang, Hubei Univ. of Technology (China)
Hubei Key Lab. of Manufacture Quality Engineering (China)
Yuning Zhong, Hubei Univ. of Technology (China)
Liangen Yang, Hubei Univ. of Technology (China)
Hubei Key Lab. of Manufacture Quality Engineering (China)
Hongduan Cao, Hubei Univ. of Technology (China)


Published in SPIE Proceedings Vol. 7133:
Fifth International Symposium on Instrumentation Science and Technology

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