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Proceedings Paper

Design and fabrication of a MEMS mirror for miniature laser projection
Author(s): René Sanders; Diederik van Lierop; Boudewijn de Jong; Herman Soemers
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Paper Abstract

For miniature laser projection displays the laser beam is swept very fast back and forth with a MEMS mirror. This paper presents an innovative design for such a MEMS mirror. Both the dynamical behavior and manufacturability have been improved. We designed a process based upon industrially proven process steps to accurately control critical parameters and fabricated a mirror consisting of: cantilever beams, out-of-plane support beams and a rhombus shaped enforcement structure. Measurements show a well defined resonant mode of operation at 23.5 kHz while suffering from only little parasitic resonance modes. This mirror can now be mass-produced at low costs.

Paper Details

Date Published: 23 February 2009
PDF: 13 pages
Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080R (23 February 2009); doi: 10.1117/12.807639
Show Author Affiliations
René Sanders, Philips Applied Technologies (Netherlands)
Diederik van Lierop, Philips Applied Technologies (Netherlands)
Boudewijn de Jong, Philips Applied Technologies (Netherlands)
Herman Soemers, Philips Applied Technologies (Netherlands)

Published in SPIE Proceedings Vol. 7208:
MOEMS and Miniaturized Systems VIII
David L. Dickensheets; Harald Schenk; Wibool Piyawattanametha, Editor(s)

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