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Proceedings Paper

Chalcogenide films for infrared integrated optics
Author(s): Caroline Vigreux; Annie Pradel
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Paper Abstract

The development of integrated optics components being able to work in the mid-infrared is of major interest for specific applications, such as the detection of pollutant gases for the environmental control or the detection of exoplanetary systems. Chalcogenide glasses being characterised by a unique property of transmission in the infrared are very promising materials for the realisation of such infrared micro-components. In order to realise and test channel waveguiding structures, we studied the deposition and the etching of chalcogenide films. Both ARROW and RIB waveguides were realised. In particular, all-chalcogenide RIB waveguides obtained by etching a Te-As-Se film deposited on an As-S bulk glass substrate were characterised at 10.6 μm.

Paper Details

Date Published: 10 February 2009
PDF: 13 pages
Proc. SPIE 7218, Integrated Optics: Devices, Materials, and Technologies XIII, 721802 (10 February 2009); doi: 10.1117/12.807594
Show Author Affiliations
Caroline Vigreux, CNRS, UMII, ENSCM, UMI, Univ. Montpellier II (France)
Annie Pradel, CNRS, UMII, ENSCM, UMI, Univ. Montpellier II (France)


Published in SPIE Proceedings Vol. 7218:
Integrated Optics: Devices, Materials, and Technologies XIII
Jean-Emmanuel Broquin; Christoph M. Greiner, Editor(s)

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